Inventor

YAN RIOPEL

CA2 patents

Patents

2 patents

US6686214B2Feb 3, 2004

Method of aligning a photolithographic mask to a crystal plane

DALSA SEMICONDUCTOR INC17 citations76

US6770213B2Aug 3, 2004

Method of inspecting an anisotropic etch in a microstructure

DALSA SEMICONDUCTOR INC7 citations68