Inventor
EBERT EARL WILLIAM
US6 patents
Patents
6 patentsUS8730476B2May 20, 2014
Tunable wavelength illumination system
ASML HOLDING NV4 citations69
US9766557B2Sep 19, 2017
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
ASML HOLDING NV1 citations60
US12504699B2Dec 23, 2025
Charge dissipative reticle table cleaning reticle
ASML HOLDING NV0 citations52
US9977351B2May 22, 2018
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
ASML HOLDING NV0 citations50
US9891540B2Feb 13, 2018
Measuring method, measurement apparatus, lithographic apparatus and device manufacturing method
ASML HOLDING NV1 citations49
US12326670B2Jun 10, 2025
Lithographic apparatus, metrology system, and intensity imbalance measurement for error correction
ASML HOLDING NV0 citations41