Inventor
SCHUSTER MARK JOSEF
US11 patents
⚠️ This page may combine multiple inventors who share the name “SCHUSTER MARK JOSEF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
7 patentsUS9632434B2Apr 25, 2017
Reticle cooling system in a lithographic apparatus
ASML HOLDING NV3 citations70
US9632433B2Apr 25, 2017
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
ASML HOLDING NV2 citations70
US9740112B2Aug 22, 2017
Patterning device support and lithographic apparatus
ASML HOLDING NV2 citations67
US9766557B2Sep 19, 2017
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
ASML HOLDING NV1 citations60
US9977351B2May 22, 2018
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
ASML HOLDING NV0 citations50
US9632429B2Apr 25, 2017
Real-time reticle curvature sensing
ASML HOLDING NV1 citations50
US9377700B2Jun 28, 2016
Determining position and curvature information directly from a surface of a patterning device
ASML HOLDING NV1 citations47
ASML NETHERLANDS BV
4 patentsUS9513568B2Dec 6, 2016
Lithographic apparatus
ASML NETHERLANDS BV2 citations61
US10788763B2Sep 29, 2020
Lithographic apparatus
ASML NETHERLANDS BV0 citations51
US9910368B2Mar 6, 2018
Patterning device manipulating system and lithographic apparatuses
ASML NETHERLANDS BV0 citations47
US10031428B2Jul 24, 2018
Gas flow optimization in reticle stage environment
ASML NETHERLANDS BV0 citations35