Inventor
DELMASTRO PETER A
US7 patents
⚠️ This page may combine multiple inventors who share the name “DELMASTRO PETER A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
4 patentsUS9632434B2Apr 25, 2017
Reticle cooling system in a lithographic apparatus
ASML HOLDING NV3 citations70
US9632433B2Apr 25, 2017
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
ASML HOLDING NV2 citations70
US9766557B2Sep 19, 2017
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
ASML HOLDING NV1 citations60
US9977351B2May 22, 2018
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
ASML HOLDING NV0 citations50