Inventor
ALIKHAN ABDULLAH
US10 patents
⚠️ This page may combine multiple inventors who share the name “ALIKHAN ABDULLAH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
9 patentsUS6906783B2Jun 14, 2005
System for using a two part cover for protecting a reticle
ASML HOLDING NV79 citations95
US7209220B2Apr 24, 2007
System for using a two part cover for and a box for protecting a reticle
ASML HOLDING NV37 citations93
US7304720B2Dec 4, 2007
System for using a two part cover for protecting a reticle
ASML HOLDING NV28 citations90
US7830497B2Nov 9, 2010
System and method for using a two part cover and a box for protecting a reticle
ASML HOLDING NV10 citations82
US9632434B2Apr 25, 2017
Reticle cooling system in a lithographic apparatus
ASML HOLDING NV3 citations70
US9632433B2Apr 25, 2017
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
ASML HOLDING NV2 citations70
US9766557B2Sep 19, 2017
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
ASML HOLDING NV1 citations60
US12560872B2Feb 24, 2026
Vacuum sheet bond fixturing and flexible burl applications for substrate tables
ASML HOLDING NV0 citations54
US9977351B2May 22, 2018
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
ASML HOLDING NV0 citations50