Inventor
BURBANK DANIEL NATHAN
US13 patents
⚠️ This page may combine multiple inventors who share the name “BURBANK DANIEL NATHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
10 patentsUS9632433B2Apr 25, 2017
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
ASML HOLDING NV2 citations70
US9632434B2Apr 25, 2017
Reticle cooling system in a lithographic apparatus
ASML HOLDING NV3 citations70
US9740112B2Aug 22, 2017
Patterning device support and lithographic apparatus
ASML HOLDING NV2 citations67
US10761435B2Sep 1, 2020
Reticle clamping device
ASML HOLDING NV2 citations64
US9766557B2Sep 19, 2017
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
ASML HOLDING NV1 citations60
US9977351B2May 22, 2018
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
ASML HOLDING NV0 citations50
US10585359B2Mar 10, 2020
Membrane assembly and particle trap
ASML HOLDING NV0 citations47
US10423081B2Sep 24, 2019
Reticle cooling by non-uniform gas flow
ASML HOLDING NV0 citations47
US9377700B2Jun 28, 2016
Determining position and curvature information directly from a surface of a patterning device
ASML HOLDING NV1 citations47
US12535745B2Jan 27, 2026
Lithographic apparatus, locking device, and method
ASML HOLDING NV0 citations41
ASML NETHERLANDS BV
3 patentsUS11204558B2Dec 21, 2021
Particle suppression systems and methods
ASML NETHERLANDS BV1 citations61
US9910368B2Mar 6, 2018
Patterning device manipulating system and lithographic apparatuses
ASML NETHERLANDS BV0 citations47
US10031428B2Jul 24, 2018
Gas flow optimization in reticle stage environment
ASML NETHERLANDS BV0 citations35