Inventor

SALLOWS DAVID E

US2 patents

Patents

2 patents

US6902622B2Jun 7, 2005

Systems and methods for epitaxially depositing films on a semiconductor substrate

MATTSON TECH INC38 citations89

US7176417B2Feb 13, 2007

Apparatuses and methods for resistively heating a thermal processing system

MATTSON TECH INC7 citations69