Inventor
KATSUUMI HISAKAZU
JP8 patents
Patents
8 patentsUS9742141B2Aug 22, 2017
Laser chamber
GIGAPHOTON INC6 citations72
US11050210B2Jun 29, 2021
Capacitor cooling structure and laser apparatus
GIGAPHOTON INC0 citations61
US10965085B2Mar 30, 2021
Laser chamber with metal damper member
GIGAPHOTON INC1 citations60
US9748727B2Aug 29, 2017
Preliminary ionization discharge device and laser apparatus
GIGAPHOTON INC1 citations51
US12567713B2Mar 3, 2026
Discharge electrode, method for manufacturing anode, and method for manufacturing electronic devices
GIGAPHOTON INC0 citations44
US9722385B2Aug 1, 2017
Laser chamber
GIGAPHOTON INC0 citations40
US10096966B2Oct 9, 2018
Gas laser device and condenser
GIGAPHOTON INC0 citations38
US10050403B2Aug 14, 2018
Excimer laser chamber device
GIGAPHOTON INC0 citations38