Inventor

TAKEZAWA KAZUYA

JP3 patents

Patents

3 patents

US9331450B2May 3, 2016

Laser apparatus

GIGAPHOTON INC0 citations50

US9130338B2Sep 8, 2015

Excimer laser and laser device

GIGAPHOTON INC1 citations48

US10050403B2Aug 14, 2018

Excimer laser chamber device

GIGAPHOTON INC0 citations38