Inventor
LII TOM
US12 patents
⚠️ This page may combine multiple inventors who share the name “LII TOM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
11 patentsUS10134731B2Nov 20, 2018
Dielectric liner added after contact etch before silicide formation
TEXAS INSTRUMENTS INC2 citations71
US9659935B2May 23, 2017
Dielectric liner added after contact etch before silicide formation
TEXAS INSTRUMENTS INC2 citations71
US9406779B2Aug 2, 2016
Spacer shaper formation with conformal dielectric film for void free PMD gap fill
TEXAS INSTRUMENTS INC2 citations60
US9385044B2Jul 5, 2016
Replacement gate process
TEXAS INSTRUMENTS INC2 citations60
US9093303B2Jul 28, 2015
Spacer shaper formation with conformal dielectric film for void free PMD gap fill
TEXAS INSTRUMENTS INC3 citations60
US9093380B2Jul 28, 2015
Dielectric liner added after contact etch before silicide formation
TEXAS INSTRUMENTS INC3 citations60
US9054158B2Jun 9, 2015
Method of forming a metal contact opening with a width that is smaller than the minimum feature size of a photolithographically-defined opening
TEXAS INSTRUMENTS INC2 citations60
US9741624B2Aug 22, 2017
Spacer shaper formation with conformal dielectric film for void free PMD gap fill
TEXAS INSTRUMENTS INC0 citations50
US9704720B2Jul 11, 2017
Uniform, damage free nitride ETCH
TEXAS INSTRUMENTS INC0 citations46
US9437449B2Sep 6, 2016
Uniform, damage free nitride etch
TEXAS INSTRUMENTS INC1 citations46
US9224657B2Dec 29, 2015
Hard mask for source/drain epitaxy control
TEXAS INSTRUMENTS INC0 citations40