Inventor
QUINTANILHA RICHARD
NL21 patents
⚠️ This page may combine multiple inventors who share the name “QUINTANILHA RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
20 patentsUS10342108B2Jul 2, 2019
Metrology methods, radiation source, metrology apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations83
US10146140B2Dec 4, 2018
Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method
ASML NETHERLANDS BV8 citations83
US9563131B2Feb 7, 2017
Lithographic apparatus, substrate and device manufacturing method
ASML NETHERLANDS BV5 citations83
US9261772B2Feb 16, 2016
Lithographic apparatus, substrate and device manufacturing method
ASML NETHERLANDS BV9 citations83
US10101671B2Oct 16, 2018
Metrology methods, metrology apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US10976265B2Apr 13, 2021
Optical detector
ASML NETHERLANDS BV2 citations72
US10254644B2Apr 9, 2019
Metrology methods, metrology apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations72
US10222709B2Mar 5, 2019
Metrology method, metrology apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations72
US10036962B2Jul 31, 2018
Inspection apparatus and methods, lithographic system and device manufacturing method
ASML NETHERLANDS BV2 citations72
US9915879B2Mar 13, 2018
Substrate and patterning device for use in metrology, metrology method and device manufacturing method
ASML NETHERLANDS BV4 citations72
US9904181B2Feb 27, 2018
Inspection apparatus and method, lithographic apparatus, lithographic processing cell and device manufacturing method
ASML NETHERLANDS BV4 citations72
US9823586B2Nov 21, 2017
Inspection apparatus, inspection method and manufacturing method
ASML NETHERLANDS BV6 citations72
US10067074B2Sep 4, 2018
Metrology methods, metrology apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations67
US11442368B2Sep 13, 2022
Inspection tool, inspection method and computer program product
ASML NETHERLANDS BV1 citations62
US11347151B2May 31, 2022
Methods and apparatus for calculating electromagnetic scattering properties of a structure
ASML NETHERLANDS BV0 citations62
US12326407B2Jun 10, 2025
Inspection apparatus and inspection method
ASML NETHERLANDS BV0 citations61
US11692948B2Jul 4, 2023
Inspection apparatus and inspection method
ASML NETHERLANDS BV0 citations61
US10634490B2Apr 28, 2020
Determining edge roughness parameters
ASML NETHERLANDS BV0 citations52
US10555407B2Feb 4, 2020
Metrology methods, radiation source, metrology apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US9632424B2Apr 25, 2017
Illumination source for use in inspection methods and/or lithography; inspection and lithographic apparatus and inspection method
ASML NETHERLANDS BV1 citations51