Inventor

TSAI MATTHEW C

US3 patents

⚠️ This page may combine multiple inventors who share the name “TSAI MATTHEW C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US7824498B2Nov 2, 2010

Coating for reducing contamination of substrates during processing

APPLIED MATERIALS INC28 citations90

US10053778B2Aug 21, 2018

Cooling pedestal with coating of diamond-like carbon

APPLIED MATERIALS INC5 citations82

PARKHE VIJAY D

1 patent

US8852348B2Oct 7, 2014

Heat exchange pedestal with coating of diamond-like material

PARKHE VIJAY D15 citations89