Inventor

SHINOZAKI YOSUKE

JP3 patents

Patents

3 patents

US10354904B2Jul 16, 2019

Electrostatic chuck

NGK SPARK PLUG CO3 citations67

US10483136B2Nov 19, 2019

Ceramic heater and electrostatic chuck

NGK SPARK PLUG CO2 citations64

US11013068B2May 18, 2021

Multilayer heating body

NGK SPARK PLUG CO0 citations47