Inventor
HALE LAYTON
US10 patents
⚠️ This page may combine multiple inventors who share the name “HALE LAYTON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
4 patentsUS9544984B2Jan 10, 2017
System and method for generation of extreme ultraviolet light
KLA TENCOR CORP10 citations82
US8963110B2Feb 24, 2015
Continuous generation of extreme ultraviolet light
KLA TENCOR CORP12 citations79
US10880979B2Dec 29, 2020
Droplet generation for a laser produced plasma light source
KLA TENCOR CORP1 citations61
US8724115B2May 13, 2014
Linear stage and metrology architecture for reflective electron beam lithography
KLA TENCOR CORP0 citations38
REFLEXION MEDICAL INC
3 patentsUS10500416B2Dec 10, 2019
High bandwidth binary multi-leaf collimator design
REFLEXION MEDICAL INC7 citations82
US11878185B2Jan 23, 2024
High bandwidth binary multi-leaf collimator design
REFLEXION MEDICAL INC2 citations71
US11285340B2Mar 29, 2022
High bandwidth binary multi-leaf collimator design
REFLEXION MEDICAL INC4 citations71