Inventor

OKAWA TATSURO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “OKAWA TATSURO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KUROKAWA MASAKI

1 patent

US8487281B2Jul 16, 2013

Electron beam exposure apparatus and electron beam exposure method

KUROKAWA MASAKI1 citations45

ADVANTEST CORP

1 patent

US9607807B2Mar 28, 2017

Charged particle beam exposure apparatus suitable for drawing on line patterns, and exposure method using the same

ADVANTEST CORP0 citations36