Inventor
NGUYEN HUNG PHI
US25 patents
⚠️ This page may combine multiple inventors who share the name “NGUYEN HUNG PHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUMINA INSTR INC
9 patentsUS11852592B2Dec 26, 2023
Time domain multiplexed defect scanner
LUMINA INSTR INC8 citations84
US11733173B1Aug 22, 2023
Time domain multiplexed defect scanner
LUMINA INSTR INC8 citations84
US11255796B2Feb 22, 2022
Region prober optical inspector
LUMINA INSTR INC10 citations84
US10767977B1Sep 8, 2020
Scattered radiation defect depth detection
LUMINA INSTR INC8 citations83
US10648928B1May 12, 2020
Scattered radiation optical scanner
LUMINA INSTR INC1 citations61
US12147033B2Nov 19, 2024
Scanning micro profiler
LUMINA INSTR INC0 citations51
US12146732B2Nov 19, 2024
Surface contour measurement
LUMINA INSTR INC0 citations51
US12146830B2Nov 19, 2024
Slope, p-component and s-component measurement
LUMINA INSTR INC0 citations51
US10641713B1May 5, 2020
Phase retardance optical scanner
LUMINA INSTR INC0 citations51
KLA TENCOR CORP
5 patentsUS7532318B2May 12, 2009
Wafer edge inspection
KLA TENCOR CORP10 citations82
US11536940B2Dec 27, 2022
3D microscope including insertable components to provide multiple imaging and measurement capabilities
KLA TENCOR CORP2 citations72
US12265212B2Apr 1, 2025
3D microscope including insertable components to provide multiple imaging and measurement capabilities
KLA TENCOR CORP0 citations62
US11294161B2Apr 5, 2022
3D microscope including insertable components to provide multiple imaging and measurement capabilities
KLA TENCOR CORP0 citations62
US10884228B2Jan 5, 2021
3D microscope including insertable components to provide multiple imaging and measurement capabilities
KLA TENCOR CORP0 citations62