Inventor
DEVASAHAYAM ADRIAN J
US3 patents
Patents
3 patentsUS6716322B1Apr 6, 2004
Method and apparatus for controlling film profiles on topographic features
VEECO INSTR INC33 citations88
US6800565B2Oct 5, 2004
Method of forming thin oxidation layer by cluster ion beam
VEECO INSTR INC16 citations81
US6934131B2Aug 23, 2005
Spin valve with thermally stable pinned layer structure having ruthenium oxide specular reflecting layer
VEECO INSTR INC7 citations70