Inventor

ABEL PAUL

US19 patents

⚠️ This page may combine multiple inventors who share the name “ABEL PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ABEL PAUL

TOKYO ELECTRON LTD

Wet atomic layer etching using self-limiting and solubility-limited reactions

Methods for wet atomic layer etching of ruthenium

Methods for forming vertically layered ionic liquid crystal (ILC) structures on a semiconductor substrate

Processing system and platform for wet atomic layer etching using self-limiting and solubility-limited reactions

Ruthenium CMP chemistry based on halogenation

Ruthenium CMP chemistry based on halogenation

Methods for selective removal of surface oxides on metal films

Method to selectively etch silicon nitride to silicon oxide using surface alkylation

Methods for etching a substrate using a hybrid wet atomic layer etching process

Methods for wet etching of noble metals

Systems for etching a substrate using a hybrid wet atomic layer etching process

Dynamically adjusted purge timing in wet atomic layer etching

Photonically tuned etchant reactivity for wet etching

Methods for wet atomic layer etching of copper

Methods for wet atomic layer etching of molybdenum

POLYSIUS AG

Satellite tube support

Rotary kiln construction

LEVANT POWER CORP

Regenerative shock absorber

MULLINS CHARLES BUDDIE

Sub-stoichiometric, chalcogen-containing-germanium, tin, or lead anodes for lithium or sodium ion batteries