Inventor
ZANDI OMID
US7 patents
Patents
7 patentsUS11691175B1Jul 4, 2023
Methods for area-selective deposition of polymer films using sequentially pulsed initiated chemical vapor deposition (spiCVD)
TOKYO ELECTRON LTD2 citations67
US10896824B2Jan 19, 2021
Roughness reduction methods for materials using illuminated etch solutions
TOKYO ELECTRON LTD0 citations60
US12290835B2May 6, 2025
Methods for stabilization of self-assembled monolayers (SAMs) using sequentially pulsed initiated chemical vapor deposition (spiCVD)
TOKYO ELECTRON LTD1 citations58
US12237166B2Feb 25, 2025
Methods for selective removal of surface oxides on metal films
TOKYO ELECTRON LTD0 citations56
US12112959B2Oct 8, 2024
Processing systems and platforms for roughness reduction of materials using illuminated etch solutions
TOKYO ELECTRON LTD0 citations49
US10867815B2Dec 15, 2020
Photonically tuned etchant reactivity for wet etching
TOKYO ELECTRON LTD0 citations49
US10818512B2Oct 27, 2020
Photo-assisted chemical vapor etch for selective removal of ruthenium
TOKYO ELECTRON LTD0 citations49