Inventor
LIM HAENG DON
KR4 patents
Patents
4 patentsUS12398459B2Aug 26, 2025
Silicon metal oxide encapsulation film comprising metal or metal oxide in thin film, and manufacturing method therefor
DNF CO LTD0 citations58
US10913755B2Feb 9, 2021
Transition metal compound, preparation method therefor, and composition for depositing transition metal-containing thin film, containing same
DNF CO LTD0 citations58
US11459653B2Oct 4, 2022
Method for manufacturing molybdenum-containing thin film and molybdenum-containing thin film manufactured thereby
DNF CO LTD0 citations56
US11827650B2Nov 28, 2023
Method of manufacturing ruthenium-containing thin film and ruthenium-containing thin film manufactured therefrom
DNF CO LTD0 citations47