P

Inventor

KAZUMI HIDEYUKI

JP74 patents
⚠️ This page may combine multiple inventors who share the name “KAZUMI HIDEYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

28 patents
US9659744B2May 23, 2017

Charged particle beam apparatus and inspection method using the same

HITACHI HIGH TECH CORP7 citations84
US9236220B2Jan 12, 2016

Electronic microscope, setting method of observation condition of electronic microscope, and observation method using electronic microscope

HITACHI HIGH TECH CORP8 citations84
US11011348B2May 18, 2021

Scanning electron microscope and sample observation method using scanning electron microscope

HITACHI HIGH TECH CORP8 citations83
US10720306B2Jul 21, 2020

Charged particle beam device

HITACHI HIGH TECH CORP4 citations83
US10249474B2Apr 2, 2019

Charged particle beam device

HITACHI HIGH TECH CORP4 citations83
US9697987B2Jul 4, 2017

Charged particle beam device

HITACHI HIGH TECH CORP9 citations83
US8648300B2Feb 11, 2014

Charged particle beam apparatus

HITACHI HIGH TECH CORP7 citations83
US7763852B2Jul 27, 2010

Scanning electron microscope having time constant measurement capability

HITACHI HIGH TECH CORP8 citations82
US6919274B2Jul 19, 2005

LSI device etching method and apparatus thereof

HITACHI HIGH TECH CORP18 citations81
US7989768B2Aug 2, 2011

Scanning electron microscope

HITACHI HIGH TECH CORP6 citations74
US10037866B2Jul 31, 2018

Charged particle beam apparatus

HITACHI HIGH TECH CORP5 citations73
US9704687B2Jul 11, 2017

Charged particle beam application device

HITACHI HIGH TECH CORP5 citations73
US9336984B2May 10, 2016

Charged particle beam device and measuring method using the same

HITACHI HIGH TECH CORP6 citations73
US11133147B2Sep 28, 2021

Charged particle ray device and cross-sectional shape estimation program

HITACHI HIGH TECH CORP2 citations72
US10304654B2May 28, 2019

Charged particle beam device

HITACHI HIGH TECH CORP3 citations72
US10229811B2Mar 12, 2019

Charged particle beam inclination correction method and charged particle beam device

HITACHI HIGH TECH CORP2 citations72
US9997326B2Jun 12, 2018

Charged particle beam device

HITACHI HIGH TECH CORP4 citations72
US9786468B2Oct 10, 2017

Charged particle beam device

HITACHI HIGH TECH CORP4 citations72
US9520266B2Dec 13, 2016

Pattern critical dimension measurement equipment and method for measuring pattern critical dimension

HITACHI HIGH TECH CORP4 citations72
US9472376B2Oct 18, 2016

Scanning electron microscope

HITACHI HIGH TECH CORP4 citations72
US8729491B2May 20, 2014

Charged particle beam apparatus

HITACHI HIGH TECH CORP4 citations72
US10121634B2Nov 6, 2018

Charged particle beam device and charged particle beam measurement method

HITACHI HIGH TECH CORP2 citations71
US9653256B2May 16, 2017

Charged particle-beam device

HITACHI HIGH TECH CORP4 citations71
US10541103B2Jan 21, 2020

Charged particle beam device

HITACHI HIGH TECH CORP3 citations68
US9159529B2Oct 13, 2015

Scanning electron microscope

HITACHI HIGH TECH CORP3 citations63
US12400383B2Aug 26, 2025

Training method for learning apparatus, and image generation system

HITACHI HIGH TECH CORP0 citations62
US12340970B2Jun 24, 2025

Charged particle beam device, and method for controlling charged particle beam device

HITACHI HIGH TECH CORP0 citations62
US11798780B2Oct 24, 2023

Charged particle beam device

HITACHI HIGH TECH CORP0 citations62

HITACHI LTD

15 patents
US6833051B2Dec 21, 2004

Plasma processing apparatus and method

HITACHI LTD33 citations96
US6388382B1May 14, 2002

Plasma processing apparatus and method

HITACHI LTD78 citations96
US6180019B1Jan 30, 2001

Plasma processing apparatus and method

HITACHI LTD51 citations96
US6499424B2Dec 31, 2002

Plasma processing apparatus and method

HITACHI LTD23 citations93
US6756737B2Jun 29, 2004

Plasma processing apparatus and method

HITACHI LTD37 citations92
US6677244B2Jan 13, 2004

Specimen surface processing method

HITACHI LTD18 citations92
US5874013AFeb 23, 1999

Semiconductor integrated circuit arrangement fabrication method

HITACHI LTD18 citations92
US6846363B2Jan 25, 2005

Plasma processing apparatus and method

HITACHI LTD11 citations82
US6481370B2Nov 19, 2002

Plasma processsing apparatus

HITACHI LTD10 citations74
US6388624B1May 14, 2002

Parallel-planar plasma processing apparatus

HITACHI LTD10 citations74
US6309980B1Oct 30, 2001

Semiconductor integrated circuit arrangement fabrication method

HITACHI LTD4 citations74
US6074958AJun 13, 2000

Semiconductor integrated circuit arrangement fabrication method

HITACHI LTD9 citations74
US5962347AOct 5, 1999

Semiconductor integrated circuit arrangement fabrication method

HITACHI LTD8 citations74
US6755935B2Jun 29, 2004

Plasma processing apparatus

HITACHI LTD5 citations63
US6492277B1Dec 10, 2002

Specimen surface processing method and apparatus

HITACHI LTD4 citations63

YAMAZAKI MINORU

2 patents
US8263934B2Sep 11, 2012

Method for detecting information of an electric potential on a sample and charged particle beam apparatus

YAMAZAKI MINORU7 citations83
US8080790B2Dec 20, 2011

Scanning electron microscope

YAMAZAKI MINORU7 citations82

ARAI NORIAKI

1 patent
US8153966B2Apr 10, 2012

Electrode unit and charged particle beam device

ARAI NORIAKI11 citations82

TSUNO NATSUKI

1 patent
US8907279B2Dec 9, 2014

Electron microscope and image capturing method using electron beam

TSUNO NATSUKI8 citations80

BAI JIE

1 patent
US9019362B2Apr 28, 2015

Charged particle beam device and a method of improving image quality of the same

BAI JIE4 citations72

IKEGAMI AKIRA

1 patent
US8274048B2Sep 25, 2012

Scanning electron microscope having time constant measurement capability

IKEGAMI AKIRA5 citations69

YOKOSUKA TOSHIYUKI

1 patent
US9640366B2May 2, 2017

Electron beam irradiation method and scanning electron microscope

YOKOSUKA TOSHIYUKI5 citations68

Showing the top 50 of 74 patents by PatentIndex Score.