Inventor
SENEKERIMYAN VAHAN A
US2 patents
Patents
2 patentsUS10210963B2Feb 19, 2019
Method of improving measurement of energy of extreme ultraviolet radiation generated in a chamber
ASML NETHERLANDS BV0 citations39
US9546901B2Jan 17, 2017
Minimizing grazing incidence reflections for reliable EUV power measurements having a light source comprising plural tubes with centerlines disposed between a radiation region and corresponding photodetector modules
ASML NETHERLANDS BV0 citations39