Inventor
SHIRAIWA HIROTSUGU
JP9 patents
⚠️ This page may combine multiple inventors who share the name “SHIRAIWA HIROTSUGU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsTEL SAGAMI LTD
4 patentsUS5054988AOct 8, 1991
Apparatus for transferring semiconductor wafers
TEL SAGAMI LTD65 citations95
US5284412AFeb 8, 1994
Stock unit for storing carriers
TEL SAGAMI LTD24 citations92
US5273423ADec 28, 1993
Heat treatment apparatus
TEL SAGAMI LTD51 citations91
US5203445AApr 20, 1993
Carrier conveying apparatus
TEL SAGAMI LTD52 citations91