Inventor
SHIH PO-CHENG
TW46 patents
⚠️ This page may combine multiple inventors who share the name “SHIH PO-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
35 patentsUS10163691B2Dec 25, 2018
Low-K dielectric interconnect systems
TAIWAN SEMICONDUCTOR MFG CO LTD36 citations94
US9754822B1Sep 5, 2017
Interconnect structure and method
TAIWAN SEMICONDUCTOR MFG CO LTD30 citations94
US11374127B2Jun 28, 2022
Multi-layer film device and method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US10727350B2Jul 28, 2020
Multi-layer film device and method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US10269627B2Apr 23, 2019
Interconnect structure and method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US10199500B2Feb 5, 2019
Multi-layer film device and method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US9842804B2Dec 12, 2017
Methods for reducing dual damascene distortion
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US12033890B2Jul 9, 2024
Patterning interconnects and other structures by photo-sensitizing method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11676855B2Jun 13, 2023
Patterning interconnects and other structures by photo-sensitizing method
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11282742B2Mar 22, 2022
Semiconductor device with multi-layer etch stop structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10840134B2Nov 17, 2020
Interconnect structure and method
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US9768061B1Sep 19, 2017
Low-k dielectric interconnect systems
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10707165B2Jul 7, 2020
Semiconductor device having an extra low-k dielectric layer and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US12148696B2Nov 19, 2024
Methods for reducing dual damascene distortion
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11482493B2Oct 25, 2022
Methods for reducing dual damascene distortion
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12564028B2Feb 24, 2026
Dielectric layers having nitrogen-containing crusted surfaces
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12424438B2Sep 23, 2025
Low-k dielectric and processes for forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12387974B2Aug 12, 2025
Patterning interconnects and other structures by photo-sensitizing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12322647B2Jun 3, 2025
Semiconductor devices and methods
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12198979B2Jan 14, 2025
Semiconductor device with multi-layer etch stop structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12166128B2Dec 10, 2024
Multi-layer film device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11848231B2Dec 19, 2023
Method for forming semiconductor device with multi-layer etch stop structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11777035B2Oct 3, 2023
Multi-layer film device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11417602B2Aug 16, 2022
Semiconductor device having an extra low-k dielectric layer and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11328952B2May 10, 2022
Interconnect structure and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11062901B2Jul 13, 2021
Low-k dielectric and processes for forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10910216B2Feb 2, 2021
Low-k dielectric and processes for forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12062613B2Aug 13, 2024
Semiconductor device having an extra low-k dielectric layer and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12302595B2May 13, 2025
Dummy hybrid film for self-alignment contact formation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10818598B2Oct 27, 2020
Methods for reducing dual damascene distortion
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10332836B2Jun 25, 2019
Methods for reducing dual damascene distortion
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9748134B2Aug 29, 2017
Method of making interconnect structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9236294B2Jan 12, 2016
Method for forming semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations52
US9093265B2Jul 28, 2015
High UV curing efficiency for low-k dielectrics
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12417948B2Sep 16, 2025
Hybrid film scheme for self-aligned contact
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
TAIWAN SEMICONDUCTOR MFG
5 patentsUS9257331B2Feb 9, 2016
Method of making interconnect structure
TAIWAN SEMICONDUCTOR MFG1 citations63
US8877083B2Nov 4, 2014
Surface treatment in the formation of interconnect structure
TAIWAN SEMICONDUCTOR MFG0 citations52
US9373581B2Jun 21, 2016
Interconnect structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG0 citations51
US9269614B2Feb 23, 2016
Method of forming semiconductor device using remote plasma treatment
TAIWAN SEMICONDUCTOR MFG1 citations51
US8993442B2Mar 31, 2015
Interconnect structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG1 citations51
SHIH PO-CHENG
4 patentsUS8470708B2Jun 25, 2013
Double patterning strategy for contact hole and trench in photolithography
SHIH PO-CHENG16 citations82
US9130017B2Sep 8, 2015
Methods for forming interconnect structures of integrated circuits
SHIH PO-CHENG4 citations72
US8994178B2Mar 31, 2015
Interconnect structure and method for forming the same
SHIH PO-CHENG2 citations60
US8853831B2Oct 7, 2014
Interconnect structure and method for forming the same
SHIH PO-CHENG0 citations51