Inventor

TSURUGIDA YOSHIROU

JP2 patents

Patents

2 patents

US6524968B2Feb 25, 2003

Method for forming insulating film and for manufacturing integrated circuit

OKI ELECTRIC IND CO LTD10 citations70

US6818567B2Nov 16, 2004

Method for selectively oxidizing a silicon wafer

OKI ELECTRIC IND CO LTD1 citations42