Inventor
KAWAZU Takahiro
JP5 patents
Patents
5 patentsUS11869780B2Jan 9, 2024
Substrate liquid processing apparatus
TOKYO ELECTRON LTD2 citations71
US11295966B2Apr 5, 2022
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD2 citations70
US11842904B2Dec 12, 2023
Control device and substrate processing method
TOKYO ELECTRON LTD0 citations59
US10985035B2Apr 20, 2021
Substrate liquid processing apparatus, substrate liquid processing method and computer readable recording medium having substrate liquid processing program recorded therein
TOKYO ELECTRON LTD0 citations50
US9887092B2Feb 6, 2018
Etching method, etching apparatus, and storage medium
TOKYO ELECTRON LTD0 citations36