Inventor

USUI HOZUMI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “USUI HOZUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUBISHI ELECTRIC CORP

2 patents

US6277205B1Aug 21, 2001

Method and apparatus for cleaning photomask

MITSUBISHI ELECTRIC CORP19 citations91

US6071376AJun 6, 2000

Method and apparatus for cleaning photomask

MITSUBISHI ELECTRIC CORP35 citations91

WATANABE & CO LTD M

1 patent

US7077915B2Jul 18, 2006

Method of and apparatus for washing photomask and washing solution for photomask

WATANABE & CO LTD M2 citations59