Inventor
GILBOA HAIM
US2 patents
Patents
2 patentsUS5202008AApr 13, 1993
Method for preparing a shield to reduce particles in a physical vapor deposition chamber
APPLIED MATERIALS INC147 citations93
US5108569AApr 28, 1992
Process and apparatus for forming stoichiometric layer of a metal compound by closed loop voltage controlled reactive sputtering
APPLIED MATERIALS INC71 citations91