Inventor
Yu da-wei
TW5 patents
Patents
5 patentsUS11698592B2Jul 11, 2023
Particle removing assembly and method of cleaning mask for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11294292B2Apr 5, 2022
Particle removing assembly and method of cleaning mask for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US12032302B2Jul 9, 2024
Method and device for cleaning substrates
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12085866B2Sep 10, 2024
Particle removing assembly and method of cleaning mask for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12393129B2Aug 19, 2025
Method and device for cleaning substrates
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59