Inventor
WANG LI-HSIN
TW5 patents
⚠️ This page may combine multiple inventors who share the name “WANG LI-HSIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
3 patentsUS11698592B2Jul 11, 2023
Particle removing assembly and method of cleaning mask for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11294292B2Apr 5, 2022
Particle removing assembly and method of cleaning mask for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US12085866B2Sep 10, 2024
Particle removing assembly and method of cleaning mask for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60