Inventor

CHEN HUNGLIN

CN7 patents

⚠️ This page may combine multiple inventors who share the name “CHEN HUNGLIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHANGHAI HUALI MICROELECT CORP

4 patents

US8865482B2Oct 21, 2014

Method of detecting the circular uniformity of the semiconductor circular contact holes

SHANGHAI HUALI MICROELECT CORP37 citations89

US9269639B2Feb 23, 2016

Method of detecting and measuring contact alignment shift relative to gate structures in a semicondcutor device

SHANGHAI HUALI MICROELECT CORP2 citations54

US8658438B2Feb 25, 2014

Measurement of lateral diffusion of implanted ions in doped well region of semiconductor devices

SHANGHAI HUALI MICROELECT CORP0 citations37

US8987013B2Mar 24, 2015

Method of inspecting misalignment of polysilicon gate

SHANGHAI HUALI MICROELECT CORP0 citations36

CHEN SHU MIN

1 patent

US11299683B2Apr 12, 2022

Liquid fuel

CHEN SHU MIN1 citations51

SHANGHAI HUALI INTEGRATED CIRCUIT CORP

1 patent

US12198061B2Jan 14, 2025

Method and apparatus for predicting yield of semiconductor devices

SHANGHAI HUALI INTEGRATED CIRCUIT CORP0 citations48

SHANGAI HUALI MICROELECTRONICS CORP

1 patent

US9080863B2Jul 14, 2015

Method for monitoring alignment between contact holes and polycrystalline silicon gate

SHANGAI HUALI MICROELECTRONICS CORP0 citations24