Inventor
WAQAR MOHSIN
US7 patents
Patents
7 patentsUS11031262B2Jun 8, 2021
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC2 citations71
US10636684B2Apr 28, 2020
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC1 citations71
US10403515B2Sep 3, 2019
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC1 citations71
US12215966B2Feb 4, 2025
Methods and systems of optical inspection of electronic device manufacturing machines
APPLIED MATERIALS INC2 citations69
US10916451B2Feb 9, 2021
Systems and methods of gap calibration via direct component contact in electronic device manufacturing systems
APPLIED MATERIALS INC0 citations60
US10361099B2Jul 23, 2019
Systems and methods of gap calibration via direct component contact in electronic device manufacturing systems
APPLIED MATERIALS INC1 citations60
US11813757B2Nov 14, 2023
Centerfinding for a process kit or process kit carrier at a manufacturing system
APPLIED MATERIALS INC1 citations56