Inventor
WIRTH PAUL ZACHARY
US12 patents
⚠️ This page may combine multiple inventors who share the name “WIRTH PAUL ZACHARY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS12215966B2Feb 4, 2025
Methods and systems of optical inspection of electronic device manufacturing machines
APPLIED MATERIALS INC2 citations69
US12494388B2Dec 9, 2025
Methods and apparatus for measuring temperature using centerfind systems
APPLIED MATERIALS INC0 citations60
US12283500B2Apr 22, 2025
Methods and systems for temperature control for a substrate
APPLIED MATERIALS INC0 citations57
US11984333B2May 14, 2024
Methods and systems for temperature control for a substrate
APPLIED MATERIALS INC0 citations57
US11551951B2Jan 10, 2023
Methods and systems for temperature control for a substrate
APPLIED MATERIALS INC0 citations57
US12476120B2Nov 18, 2025
Modular mainframe layout for supporting multiple semiconductor process modules or chambers
APPLIED MATERIALS INC0 citations56
US11935771B2Mar 19, 2024
Modular mainframe layout for supporting multiple semiconductor process modules or chambers
APPLIED MATERIALS INC0 citations56
US11813757B2Nov 14, 2023
Centerfinding for a process kit or process kit carrier at a manufacturing system
APPLIED MATERIALS INC1 citations56
US11413767B2Aug 16, 2022
Sensor-based position and orientation feedback of robot end effector with respect to destination chamber
APPLIED MATERIALS INC1 citations55
US11935770B2Mar 19, 2024
Modular mainframe layout for supporting multiple semiconductor process modules or chambers
APPLIED MATERIALS INC0 citations47