Inventor
HATANO MICHIO
JP20 patents
⚠️ This page may combine multiple inventors who share the name “HATANO MICHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
11 patentsUS7504624B2Mar 17, 2009
Charged particle beam device
HITACHI HIGH TECH CORP13 citations84
US7755045B2Jul 13, 2010
Scanning electron microscope
HITACHI HIGH TECH CORP14 citations83
US11538659B2Dec 27, 2022
Charged particle beam device, autofocus processing method of charged particle beam device, and detector
HITACHI HIGH TECH CORP2 citations73
US9472376B2Oct 18, 2016
Scanning electron microscope
HITACHI HIGH TECH CORP4 citations72
US11348757B2May 31, 2022
Charged particle beam device
HITACHI HIGH TECH CORP2 citations71
US11348758B2May 31, 2022
Charged particle beam device
HITACHI HIGH TECH CORP2 citations66
US12315695B2May 27, 2025
Sample holder, intermembrane distance adjustment mechanism, and charged particle beam device
HITACHI HIGH TECH CORP0 citations52
US12265041B2Apr 1, 2025
Thin film damage detection function and charged particle beam device
HITACHI HIGH TECH CORP0 citations52
US9245711B2Jan 26, 2016
Charged particle beam apparatus and image forming method
HITACHI HIGH TECH CORP0 citations52
US10438771B2Oct 8, 2019
Measurement device, calibration method of measurement device, and calibration member
HITACHI HIGH TECH CORP0 citations51
US9521372B2Dec 13, 2016
Pattern measuring apparatus, pattern measuring method, and computer-readable recording medium on which a pattern measuring program is recorded
HITACHI HIGH TECH CORP0 citations41