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Inventor
HWANG HEE-SUB
KR
2 patents
⚠️ This page may combine multiple inventors who share the name “HWANG HEE-SUB”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IUCF HYU
1 patent
US9287132B2
Mar 15, 2016
Multi-selective polishing slurry composition and a semiconductor element production method using the same
IUCF HYU
2 citations
59
PARK JEA-GUN
1 patent
US9163314B2
Oct 20, 2015
CMP slurry composition for tungsten
PARK JEA-GUN
0 citations
47