Inventor
LAI RUI-LING
US10 patents
Patents
10 patentsUS11508547B2Nov 22, 2022
Semiconductor charged particle detector for microscopy
ASML NETHERLANDS BV4 citations72
US11476085B2Oct 18, 2022
Switch matrix design for beam image system
ASML NETHERLANDS BV2 citations71
US12205792B2Jan 21, 2025
Semiconductor charged particle detector for microscopy
ASML NETHERLANDS BV0 citations61
US12030772B2Jul 9, 2024
MEMS image forming element with built-in voltage generator
ASML NETHERLANDS BV0 citations61
US11942304B2Mar 26, 2024
Field programmable detector array
ASML NETHERLANDS BV0 citations61
US11862427B2Jan 2, 2024
Switch matrix design for beam image system
ASML NETHERLANDS BV0 citations61
US11430629B2Aug 30, 2022
Field programmable detector array
ASML NETHERLANDS BV0 citations61
US12469669B2Nov 11, 2025
Printed circuit board for sealing vacuum system
ASML NETHERLANDS BV0 citations51
US12381064B2Aug 5, 2025
Architecture for large active area high speed detector
ASML NETHERLANDS BV0 citations50
US12230470B2Feb 18, 2025
Charged particle detector with gain element
ASML NETHERLANDS BV0 citations50