Inventor

DIETZE UWE

US13 patents

⚠️ This page may combine multiple inventors who share the name “DIETZE UWE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO KG

8 patents

US10265739B2Apr 23, 2019

Method and apparatus for treating substrates

SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO KG1 citations58

US11090693B2Aug 17, 2021

Device for applying to a substrate a liquid medium that has been charged with UV radiation

SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO KG1 citations56

US11410858B2Aug 9, 2022

Device for applying to a substrate a liquid medium which is exposed to UV radiation

SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO KG0 citations45

US11130158B2Sep 28, 2021

Device for applying a liquid medium which is exposed to UV radiation to a substrate

SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO KG0 citations45

US11358172B2Jun 14, 2022

Method for treating substrates with an aqueous liquid medium exposed to UV-radiation

SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO KG0 citations44

US10898932B2Jan 26, 2021

Method and apparatus for cleaning a substrate and computer program product

SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO KG0 citations41

US10843235B2Nov 24, 2020

Device for applying a liquid medium which is exposed to UV radiation to a substrate

SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO KG0 citations29

US10845718B2Nov 24, 2020

Holder for holding and for protecting a side of a photomask or a photomask or a photomask having pellicle from a cleaning medium, method for cleaning a photomask or a photomask with pellicle and device for opening and closing a holder

SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO KG0 citations25

STEAG HAMATECH AG

2 patents

US6512207B1Jan 28, 2003

Apparatus and method for the treatment of substrates

STEAG HAMATECH AG40 citations89

US6919538B2Jul 19, 2005

Method for thermally treating substrates

STEAG HAMATECH AG15 citations80

SUSS MIRCROTEC PHOTOMASK EQUIPMENT GMBH & CO KG

2 patents

US10722925B2Jul 28, 2020

Treatment head, treatment system and method for treating a local surface area of a substrate

SUSS MIRCROTEC PHOTOMASK EQUIPMENT GMBH & CO KG1 citations51

US10416575B2Sep 17, 2019

Apparatus and method for cleaning a partial area of a substrate

SUSS MIRCROTEC PHOTOMASK EQUIPMENT GMBH & CO KG0 citations28

DIETZE UWE

1 patent

US9662684B2May 30, 2017

Method and apparatus for treating substrates

DIETZE UWE0 citations42