Inventor

KOO JOHN BON-WOONG

US3 patents

⚠️ This page may combine multiple inventors who share the name “KOO JOHN BON-WOONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

2 patents

US8003956B2Aug 23, 2011

Method and apparatus for controlling beam current uniformity in an ion implanter

VARIAN SEMICONDUCTOR EQUIPMENT3 citations60

US8003498B2Aug 23, 2011

Particle beam assisted modification of thin film materials

VARIAN SEMICONDUCTOR EQUIPMENT3 citations59

KOO JOHN BON-WOONG

1 patent

US8263944B2Sep 11, 2012

Directional gas injection for an ion source cathode assembly

KOO JOHN BON-WOONG6 citations65