Inventor
NETCHITALIOUK ANDREI IVANOVICH
LT3 patents
Patents
3 patentsUS7158221B2Jan 2, 2007
Method and apparatus for performing limited area spectral analysis
APPLIED MATERIALS INC14 citations90
US7330244B2Feb 12, 2008
Method and apparatus for performing limited area spectral analysis
APPLIED MATERIALS INC9 citations82
US7602484B2Oct 13, 2009
Method and apparatus for performing limited area spectral analysis
APPLIED MATERIALS INC2 citations60