Inventor

LALLY KEVIN J

US2 patents

⚠️ This page may combine multiple inventors who share the name “LALLY KEVIN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US7289864B2Oct 30, 2007

Feature dimension deviation correction system, method and program product

TOKYO ELECTRON LTD8 citations70

IBM

1 patent

US7502660B2Mar 10, 2009

Feature dimension deviation correction system, method and program product

IBM0 citations49