Inventor
OPAITS Dmitry
US4 patents
Patents
4 patentsUS10312121B2Jun 4, 2019
Systems and methods for aligning measurement device in substrate processing systems
LAM RES CORP2 citations69
US11791189B2Oct 17, 2023
Reflectometer to monitor substrate movement
LAM RES CORP0 citations56
US9752981B2Sep 5, 2017
Apparatus with a spectral reflectometer for processing substrates
LAM RES CORP1 citations47
US10224187B1Mar 5, 2019
Detecting partial unclamping of a substrate from an ESC of a substrate processing system
LAM RES CORP0 citations46