P

Inventor

DENHOLM A STUART

US9 patents
⚠️ This page may combine multiple inventors who share the name “DENHOLM A STUART”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EATON CORP

4 patents
US6050218AApr 18, 2000

Dosimetry cup charge collection in plasma immersion ion implantation

EATON CORP114 citations96
US5911832AJun 15, 1999

Plasma immersion implantation with pulsed anode

EATON CORP117 citations95
US5654043AAug 5, 1997

Pulsed plate plasma implantation system and method

EATON CORP124 citations95
US6180954B1Jan 30, 2001

Dual-walled exhaust tubing for vacuum pump

EATON CORP24 citations87

AXCELIS TECH INC

2 patents
US6237527B1May 29, 2001

System for improving energy purity and implant consistency, and for minimizing charge accumulation of an implanted substrate

AXCELIS TECH INC281 citations98
US6101971AAug 15, 2000

Ion implantation control using charge collection, optical emission spectroscopy and mass analysis

AXCELIS TECH INC142 citations94

ENERGY SCIENCES INC

1 patent
US4382186AMay 3, 1983

Process and apparatus for converged fine line electron beam treatment of objects

ENERGY SCIENCES INC89 citations95

ZYMET INC

1 patent
US4528208AJul 9, 1985

Method and apparatus for controlling article temperature during treatment in vacuum

ZYMET INC21 citations75

SONY CORP

1 patent
US4446373AMay 1, 1984

Process and apparatus for converged fine line electron beam treatment objects

SONY CORP16 citations72