Inventor
ADAMCZYK ANDREW J
US3 patents
Patents
3 patentsUS10249489B2Apr 2, 2019
Use of silyl bridged alkyl compounds for dense OSG films
VERSUM MAT US LLC7 citations80
US10934485B2Mar 2, 2021
Etching solution for selectively removing silicon over silicon-germanium alloy from a silicon-germanium/ silicon stack during manufacture of a semiconductor device
VERSUM MAT US LLC3 citations70
US10879076B2Dec 29, 2020
Etching solution for selectively removing silicon-germanium alloy from a silicon-germanium/silicon stack during manufacture of a semiconductor device
VERSUM MAT US LLC1 citations60