Inventor

SHAN FANG

US2 patents

Patents

2 patents

US9463528B2Oct 11, 2016

Laser systems and methods for internally marking thin layers, and articles produced thereby

ELECTRO SCIENT IND INC3 citations69

US9610653B2Apr 4, 2017

Method and apparatus for separation of workpieces and articles produced thereby

ELECTRO SCIENT IND INC5 citations66