Inventor
KATO TIHARU
JP5 patents
⚠️ This page may combine multiple inventors who share the name “KATO TIHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
3 patentsUS4914006AApr 3, 1990
Positive resist quaternary ammonium hydroxide containing developer with cationic and nonionic surfactant
TOSHIBA KK37 citations92
US4792534ADec 20, 1988
Method of manufacturing a semiconductor device involving sidewall spacer formation
TOSHIBA KK31 citations90
US4988609AJan 29, 1991
Method of forming micro patterns
TOSHIBA KK10 citations71