P

Inventor

FUJIOKA HIDEHIKO

JP33 patents
⚠️ This page may combine multiple inventors who share the name “FUJIOKA HIDEHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

14 patents
US5134436AJul 28, 1992

Exposure control method for adjusting the temperature of a workpiece holding chuck attracting surface based on memorized data

CANON KK59 citations96
US5026239AJun 25, 1991

Mask cassette and mask cassette loading device

CANON KK81 citations96
US5593800AJan 14, 1997

Mask manufacturing method and apparatus and device manufacturing method using a mask manufactured by the method or apparatus

CANON KK52 citations93
US5871587AFeb 16, 1999

Processing system for semiconductor device manufacture of otherwise

CANON KK46 citations92
US5828572AOct 27, 1998

Processing System and semiconductor device production method using the same including air conditioning control in operational zones

CANON KK32 citations92
US5574556ANov 12, 1996

Stage mechanism in exposure apparatus

CANON KK19 citations92
US5467637ANov 21, 1995

Method of measuring gas purity information, chamber unit and exposure unit using the method and a device production method

CANON KK23 citations92
US5356686AOct 18, 1994

X-ray mask structure

CANON KK22 citations92
US5253012AOct 12, 1993

Substrate holding apparatus for vertically holding a substrate in an exposure apparatus

CANON KK33 citations92
US4963921AOct 16, 1990

Device for holding a mask

CANON KK48 citations92
US5746562AMay 5, 1998

Processing system and device manufacturing method using the same

CANON KK15 citations82
US6406245B2Jun 18, 2002

Processing system and device manufacturing method using the same

CANON KK11 citations74
US5641264AJun 24, 1997

Substrate conveying device and method of controlling the same

CANON KK9 citations74
US6809799B2Oct 26, 2004

Processing system and device manufacturing method using the same

CANON KK0 citations52

SHIROKI CORP

12 patents

KIMURA AKIHIRO

2 patents

TAKASHIMAYA NIPPATSU KOGYO

1 patent

JAPAN TECTRON INSTR CORP

1 patent

SUZUKI HIROYUKI

1 patent

SHIROKI KOGYO CO LTD

1 patent

ITO KOJI

1 patent