Inventor
HARUTA KENYU
JP14 patents
Patents
14 patentsUS6008914ADec 28, 1999
Laser transfer machining apparatus
MITSUBISHI ELECTRIC CORP129 citations98
US5760366AJun 2, 1998
Thin film forming apparatus using laser and magnetic field
MITSUBISHI ELECTRIC CORP87 citations96
US4686682AAug 11, 1987
Discharge excitation type short pulse laser device
MITSUBISHI ELECTRIC CORP102 citations96
US4914662AApr 3, 1990
Laser wavelength stabilization
MITSUBISHI ELECTRIC CORP57 citations95
US6110291AAug 29, 2000
Thin film forming apparatus using laser
MITSUBISHI ELECTRIC CORP67 citations94
US6033741AMar 7, 2000
Thin film forming apparatus using laser
MITSUBISHI ELECTRIC CORP32 citations92
US5187716AFeb 16, 1993
Excimer laser device
MITSUBISHI ELECTRIC CORP57 citations92
US5181217AJan 19, 1993
Laser oscillator circuit
MITSUBISHI ELECTRIC CORP21 citations92
US4837773AJun 6, 1989
Discharge excitation type short pulse laser
MITSUBISHI ELECTRIC CORP30 citations92
US4722090AJan 26, 1988
Excimer laser equipment
MITSUBISHI ELECTRIC CORP35 citations92
US5305338AApr 19, 1994
Switch device for laser
MITSUBISHI ELECTRIC CORP24 citations91
US5107511AApr 21, 1992
Method of stabilizing laser wavelength and laser device with stabilized wavelength
MITSUBISHI ELECTRIC CORP13 citations71
US5177762AJan 5, 1993
Saturable reactor
MITSUBISHI ELECTRIC CORP4 citations63
US5258994ANov 2, 1993
Discharge-excited laser apparatus
MITSUBISHI ELECTRIC CORP5 citations62