Inventor
LANG JOSEF
DE5 patents
⚠️ This page may combine multiple inventors who share the name “LANG JOSEF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WACKER CHEMITRONIC
2 patentsUS5167667ADec 1, 1992
Process for treating polishing cloths used for semiconductor wafers
WACKER CHEMITRONIC22 citations90
US5110428AMay 5, 1992
Process and apparatus for double-sided chemomechanical polishing of semiconductor wafers and semiconductor wafers obtainable thereby
WACKER CHEMITRONIC31 citations90