Inventor · disambiguated record
Yozo Fukagawa
Also filed as: FUKAGAWA YOZO
2 granted patents·47 citations·filing 1999–2001
65Inventor score
Technology areasG03F
Files withCANON KK2
Top patents by PatentIndex Score
2 records- 0174US6741328B2Exposure apparatus and its control method, stage apparatus, and device manufacturing methodCANON KK·Filed 2001·Granted May 25, 2004·14 cites·35 claims
- 0273US6330052B1Exposure apparatus and its control method, stage apparatus, and device manufacturing methodCANON KK·Filed 1999·Granted Dec 11, 2001·33 cites·12 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →