Inventor
MIGNARDI MICHAEL A
US11 patents
Patents
11 patentsUS5452138ASep 19, 1995
Deformable mirror device with integral color filter
TEXAS INSTRUMENTS INC192 citations98
US5226099AJul 6, 1993
Digital micromirror shutter device
TEXAS INSTRUMENTS INC441 citations98
US5605489AFeb 25, 1997
Method of protecting micromechanical devices during wafer separation
TEXAS INSTRUMENTS INC106 citations97
US5389182AFeb 14, 1995
Use of a saw frame with tape as a substrate carrier for wafer level backend processing
TEXAS INSTRUMENTS INC114 citations97
US5240818AAug 31, 1993
Method for manufacturing a color filter for deformable mirror device
TEXAS INSTRUMENTS INC58 citations96
US5867202AFeb 2, 1999
Micromechanical devices with spring tips
TEXAS INSTRUMENTS INC68 citations95
US5527744AJun 18, 1996
Wafer method for breaking a semiconductor
TEXAS INSTRUMENTS INC97 citations95
US5445559AAug 29, 1995
Wafer-like processing after sawing DMDs
TEXAS INSTRUMENTS INC76 citations95
US5393706AFeb 28, 1995
Integrated partial sawing process
TEXAS INSTRUMENTS INC44 citations95
US5597767AJan 28, 1997
Separation of wafer into die with wafer-level processing
TEXAS INSTRUMENTS INC112 citations92
US7106491B2Sep 12, 2006
Split beam micromirror
TEXAS INSTRUMENTS INC23 citations91